Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics
Year: 2022
Type: article
Abstract: As the importance of measuring electron density has become more significant in the material fabrication industry, various related plasma monitoring tools have been introduced. In this paper, the development of a microwave probe, called the measurement of lateral electron density (MOLE) probe, is reported. The basic properties of the MOLE probe are analyzed via three-dimensional electromagnetic wave simulation, with simulation results showing that the probe estimates electron density by measuring the surface wave resonance frequency from the reflection microwave frequency spectrum (S11). Furthermore, an experimental demonstration on a chamber wall measuring lateral electron density is conducted by comparing the developed probe with the cutoff probe, a precise electron density measurement tool. Based on both simulation and experiment results, the MOLE probe is shown to be a useful instrument to monitor lateral electron density.
Source: Sensors
DOI: 10.3390/s22155487
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,513
Funders: National Research Foundation, Ministry of Trade, Industry and Energy, Ministry of Science, ICT and Future Planning, Korea Institute for Advancement of Technology, Korea Institute of Machinery and Materials, National Fusion Research Institute, National Research Foundation of Korea, National Research Council of Science and Technology, Korea Semiconductor Research Consortium, Korea Evaluation Institute of Industrial Technology, Korea Institute of Energy Technology Evaluation and Planning
Awards: G1051320059, G1077390678, G1187212784, G1258396566, G1450535516, G1639473818, G2138929314, G2269248123, G2553057811, G2622121627, G2934130263, G3033947846, G344852209, G3528191943, G4147896100, G4377505997, G4558631983, G5223374715, G5238336737, G6257846544, G6608521049, G6615132664, G6717977975, G7065812782, G710128393, G7318744259, G7707663041, G7764316060, G796586662, G8653408984
OpenAlex ID: W4287220114