Work

TiN layer epitaxial growth deposited at different radiofrequency powers onto the monocrystalline substrate MgO

Year: 2019

Type: conference-paper

Source: HAL

Authors: Messaid, Bachir, Le Paven, Claire, Talaighil, Razika, Benzerga, Ratiba, Marlec, Florent, Le Gendre, Laurent, Bensouici, Fayçal

Institutions: Institut d'Électronique et des Technologies du numéRique, University of Boumerdes

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4288025264

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