H2MEMS Project: Resonant MEMS for Detection of Hydrogen Release in Radioactive Waste Disposal Facility1
Year: 2022
Type: conference-paper
Abstract: SummaryThe H2MEMS project aims at developing and optimizing hydrogen sensors based on resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. The principle adopted is based on measuring physical properties of the gas (mass density, viscosity, sound velocity and sound absorption) without requiring any sensitive layer. For this purpose, resonant microcantilevers and CMUT were used.
Authors: Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-Francois Michaud, Laurent Colin, Daniel Alquier, Dominique Certon, Maria-Dolores Manrique-Juarez, Thierry Leichle, Fabrice Mathieu, Laurent Mazenq, Liviu Nicu, Luan Nguyen, Sebastien Chenot, Marc Portail, Johan Bertrand
Institutions: Centre National de la Recherche Scientifique, Laboratoire de l'Intégration du Matériau au Système, Université de Tours, GREMAN, Matériaux, Microélectronique, Acoustique, Nanotechnologies, Laboratoire d'Analyse et d'Architecture des Systèmes, Centre de Recherche sur l'Hétéro-Epitaxie et ses Applications, Agence Nationale pour la Gestion des Déchets Radioactifs
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4291908985