Work

Optical metasurfaces made by cell projection lithography

Year: 2022

Type: article

Source: PhotonicsViews

DOI: 10.1002/phvs.202200036

Authors: Mathias Hädrich, Thomas Siefke, Michael Banasch, Uwe D. Zeitner

Institutions: Vistec Electron Beam (Germany), Fraunhofer Institute for Applied Optics and Precision Engineering

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4293324930

FWCI: 0.818

Cites: 3

Cited by: 14

Related to: 10