The impact of rapid thermal annealing for the ferroelectricity of undoped sputtered HfO2 and its wake-up effect
Year: 2022
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/5.0100562
Institution: Christian-Albrechts-Universität zu Kiel
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Deutsche Forschungsgemeinschaft
OpenAlex ID: W4294030573