Work

Low Temperature Ion Beam Sputtered Optical Coatings

Year: 2022

Type: conference-paper

Abstract: The effect of low temperature ion beam sputtering on thin film properties was investigated. The SiO2 and Ta2O5 films grown at 0°C show a trend of lower optical losses and higher LIDT compared to 100°C.

Source: Optical Interference Coatings

DOI: 10.1364/oic.2022.thc.6

Authors: Th. Gischkat, D. Schachtler, F. Steger, Z. Balogh-Michels, R. Botha, B. Vetsch, T. Strüning, J. Birkhölzer, M. Michler, Ch. Mühlig, S. Schwinde, M. Trost, S. Schröder, A. Borzi, A. Neels

Institutions: RhySearch (Switzerland), Leibniz Institute of Photonic Technology, Fraunhofer Institute for Applied Optics and Precision Engineering, Empa

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W4294316239

FWCI:

Cites: 2

Cited by:

Related to: 10