Work

Transmission electron microscopy study of the platinum germanide formation process in the Ge/Pt/SiO2/Si structure

Year: 2008

Type: conference-paper

Source: HAL

Authors: Laszcz, A., Ratajczak, J., Czerwinski, A., Katcki, J., Srot, V., Phillipp, F., van Aken, P.A., Breil, N., Larrieu, G., Dubois, Emmanuel

Institution: Institut d'Electronique, de Microélectronique et de Nanotechnologie

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4298302013

FWCI:

Cites:

Cited by: 1

Related to: 10