Work

Device for Carrying Out a Deposit of Particles on a Substrate and Deposition Method Using Such a Device

Year: 2015

Type: other

Source: HAL

Authors: Picard, E., Cordeiro, J., Berton, K., Peyrade, D., Zelsmann, M.

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire des Technologies de la Microélectronique

Language: English

Topic: Advanced Materials and Semiconductor Technologies

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4299950165

Cites:

Cited by:

Related to: 10