Work

Electrostatic Damage in Semiconductor Manufacturing Through the Inappropriate Use of Grounding

Year: 2022

Type: conference-paper

Source: Annual EOS/ESD Symposium (EOS/ESD)

DOI: 10.23919/eos/esd54763.2022.9928507

Authors: Larry B Levit, Gavin C Rider, Iad Mirshad

Language: English

Topic: Electrostatic Discharge in Electronics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4308069729

FWCI: 0.785

Cites:

Cited by: 3

Related to: 10