Work

Different Beam Configurations for Compliant Mechanism-Based MEMS Accelerometer

Year: 2022

Type: conference-paper

Source: Mechanisms and machine science

DOI: 10.1007/978-3-031-20353-4_8

Authors: Nikul Jani, Mithlesh Kumar, P. Krishna Menon, Ashok Kumar Pandey

Institutions: Indian Institute of Technology Hyderabad, Research Centre Imarat

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4309554169

FWCI: 1.554

Cites: 14

Cited by: 4

Related to: 10