High-precision polarized dual low-coherence scanning interferometry for rapid step height measurements
Year: 2022
Type: article
Source: Applied Optics
DOI: 10.1364/ao.477502
Authors: Hyo Mi Park, Seon Ile Seo, Min Seo Cho, Ki-Nam Joo
Institution: Chosun University
Language: English
Subfield: Computer Vision and Pattern Recognition
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
Awards: G3610118251, G5145202491
OpenAlex ID: W4312106982