Work

Novel and Simple Cross-sectional FIB Circuit Edit Techniques for Circuit Isolation

Year: 2022

Type: conference-paper

Source: IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

DOI: 10.1109/ipfa55383.2022.9915711

Authors: P. K. Tan, Y. L. Pan, S. L. Ting, A. C. T. Quah, Y. S. Tam, Angela Teo, N. Y. Xu, H. H. W. Thoungh, K. K. Kang, T. T. Yu, C. Q. Chen

Institution: GlobalFoundries (Singapore)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4312376970

FWCI:

Cites:

Cited by: 1

Related to: 10