Work

Fabrication of surface-micromachined circular piezoelectric micromachined ultrasonic transducers with various etching holes using XeF2 and simulation of their vibrational characteristics

Year: 2023

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2023.114159

Authors: Seonhyoung Kim, Hong Goo Yeo, Jungho Ryu, Hongsoo Choi

Institutions: Daegu Gyeongbuk Institute of Science and Technology, Sun Moon University, Yeungnam University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4313856499

FWCI: 0.998

Cites: 30

Cited by: 14

Related to: 10