Work

Influence of an Alternating Phase on the Electron Heating in Capacitively Coupled Radio-Frequency Discharges

Year: 2023

Type: conference-paper

Source: Lecture notes in electrical engineering

Parent work: Proceedings of the 3rd International Conference on Electronic Engineering and Renewable Energy Systems: ICEERE 2022, 20 -22 May 2022, Saidia, Morocco

DOI: 10.1007/978-981-19-6223-3_17

Authors: Abdelhak Missaoui, Morad El kaouini, Hassan Chatei

Institution: Mohamed I University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4365129083

FWCI:

Cites: 11

Cited by:

Related to: 10