Work

Uv Oh Band Spectrum for Temperature Measurements of Non-equilibrium Plasmas

Year: 2023

Type: conference-paper

Source: Progress in Plasma Processing of Materials

DOI: 10.1615/itppc-1996.250

Authors: Stephane Pellerin, K. Musiol, J.-M. Cormier, F. Richard, J. Chapelle

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4366114137

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