Work

Characterization of Polysilicon Strength through On-Chip Testing at MEMS Stoppers

Year: 2023

Type: conference-paper

Source: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

DOI: 10.1109/eurosime56861.2023.10100798

Authors: Tiago Vicentini Ferreira Do Valle, Aldo Ghisi, Biagio De Masi, Stefano Mariani, Francesco Rizzini, Gabriele Gattere, Carlo Valzasina

Institutions: Politecnico di Milano, STMicroelectronics (Italy)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: STMicroelectronics

OpenAlex ID: W4366140272

FWCI: 0.448

Cites: 16

Cited by: 1

Related to: 10