Work

Analysis of the transmission spectrum of the flat-cutoff sensors on wafers with metal layer

Year: 2023

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/5.0143763

Authors: H. J. Yeom, Gwang-Seok Chae, Jung Hyung Kim, ShinJae You, Hyo-Chang Lee

Institutions: Chungnam National University, Korea Research Institute of Standards and Science, Korea Aerospace University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Korea Research Institute of Standards and Science, National Research Foundation of Korea, National Research Council of Science and Technology, Korea Evaluation Institute of Industrial Technology

Awards: G1491680630, G2752232947, G2978557231, G5172239042, G8938636614

OpenAlex ID: W4366176201

FWCI: 0.356

Cites: 30

Cited by: 5

Related to: 10