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Nanoporous ZnO structure prepared by HiPIMS sputtering for enhanced ozone gas detection

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Year: 2023
Type: article
Source: Materials Today Communications
DOI: 10.1016/j.mtcomm.2023.106024
Authors: Yempati Nagarjuna, Yu-Jen Hsiao, Sheng-Chang Wang, Cheng-Ye Shao, Yu-Chun Huang
Institution: Southern Taiwan University of Science and Technology
Language: English

Topic: Gas Sensing Nanomaterials and Sensors
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: green

Funder: Ministry of Science and Technology, Taiwan
Awards: Prospective Technology Development of Next-Generation Low-Energy Mems Semiconductor Gas Sensors( II ), To Develop Vertical Zinc Oxide Nano-Needles Array for Self-Powered Environmental Sensing Applications
OpenAlex ID: W4366364515
FWCI: 0.998
Cites: 46
Cited by: 14
Related to: 10
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