Work

Absorber material deficiency impact on a stochastically patterned wafer analyzed with a clustered model

Year: 2023

Type: conference-paper

DOI: 10.1117/12.2658777

Authors: Lawrence S. Melvin, Yudhishthir Kandel, Zachary A. Levinson, Ulrich Welling

Institutions: Synopsys (United States), Synopsys (Germany)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4367308366

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