Design optimization of silicon nitride-based micro-ring resonator systems in a CMOS mass production environment
Year: 2023
Type: conference-paper
DOI: 10.1117/12.2665322
Institutions: Graz University of Technology, OSRAM (Germany)
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4378802404
