Polishing of diamond, SiC, GaN based on the oxidation modification of hydroxyl radical: Status, challenges and strategies
Year: 2023
Type: article
Authors: Dong Shi, Wei Zhou, Tianchen Zhao
Institutions: Xiamen University, Quzhou University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4383901232