Work

Challenges in porosity characterization of thin films: Cross-evaluation of different techniques

Year: 2023

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0002793

Authors: Mikhail R. Baklanov, Konstantin P. Mogilnikov, Alexey S. Vishnevskiy

Institutions: MIREA - Russian Technological University, European Centre for Knowledge and Technology Transfer, Institute of Semiconductor Physics

Language: English

Topic: Muon and positron interactions and applications

Subfield: Condensed Matter Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funders: Russian Science Foundation, Ministry of Science and Higher Education of the Russian Federation

Awards: G2573971816, G7294905615

OpenAlex ID: W4384929664

FWCI: 2.444

Cites: 81

Cited by: 27

Related to: 10