Determination of Equivalent Material Properties of Microsystem Structure for Structural Simulation Analysis
Year: 2023
Type: article
Authors: Lei Tang, Nailiang Kuang, Xingshe Zhou
Institution: Northwestern Polytechnical University
Language: English
Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4385299889