Polarization phase shifting for thickness measurement of NiO material transport layer using Sagnac interferometer
Year: 2023
Type: conference-paper
Source: SPIE Applied Optical Metrology
DOI: 10.1117/12.2678176
Language: English
Subfield: Computer Vision and Pattern Recognition
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4387329015
