Work

MEMS-based piezoresistive and capacitive microphones: A review on materials and methods

Year: 2023

Type: article

Source: Materials Science in Semiconductor Processing

DOI: 10.1016/j.mssp.2023.107879

Authors: Ashish Kumar, Arathy Varghese, Dheeraj Kalra, Anshuman Raunak, Jaiverdhan, Mahanth Prasad, Vijay Janyani, R.P. Yadav

Institutions: National Institute of Technology Raipur, Cardiff University, GLA University, Central Electronics Engineering Research Institute, VIT-AP University, Malaviya National Institute of Technology Jaipur

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4387761140

FWCI: 2.352

Cites: 143

Cited by: 33

Related to: 10