Work

Evaluating the Ge: C ratio on the bonding structure, hardness, and residual stress of Ge1-x-Cx coatings fabricated by the PE-CVD method

Year: 2023

Type: article

Source: Vacuum

DOI: 10.1016/j.vacuum.2023.112827

Authors: H. Jamali, R. Mozaffarinia, A. Eshaghi, A. Ghasemi, M. Tavoosi, G.R. Gordani, M. Rezazadeh, R. Ahmadi-Pidani, S. Torkian, E. Mohammad Sharifi, M.R. Loghman Estarki

Institution: Malek Ashtar University of Technology

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4388997307

FWCI: 0.498

Cites: 75

Cited by: 5

Related to: 10