Seven-shaped beam design for improving the sensitivity of two-dimensional MEMS sensors
Year: 2023
Type: article
Authors: Nanyan Zhou, Wu Liu, Feng Cui, Xinwei Zhang, Leyang Lv
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G4821153422, 基于随机共振增强的仿生纤毛微剪应力传感器研究
OpenAlex ID: W4389977342