Properties and practical application of thin CeOx films
Year: 2010
Type: article
Abstract: The properties of CeOx films produced by various methods have been investigated. According to the comparative analisys “metallic mirror oxidation” method allows producing films with significantly better characteristics than the «explosive evaporation» method. Though, the latter method yields higher photosensitivity of CeOx films and structures on their base. In the process, the optimal value of the substrate temperature was determined. Obtained data expand the CeOx application potential in microelectronic sensor sphere.
Authors: H. B. Максимчук, A. H. Шмырева, A. B. Борисов
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4390458564