Work

Creation of Sms Targets, Composition of Magnetron Sputtering Films

Year: 2024

Type: preprint

Source: SSRN Electronic Journal

DOI: 10.2139/ssrn.4732508

Authors: Ilya Olegovich Yurev, Maxim Molokeev, A.S. Aleksandrovsky, Alexandr Petrovich Tyutyunnik, Roza Iosifovna Gulyaeva, Aleksei Aleksandrovich Polkovnikov, Nikita Anatolyevich Shulaev, Vitaly Grigoryevich Bamburov, Andrey Vladimirovich Elyshev, O.V. Andreev

Institutions: University of Tyumen, Russian Academy of Sciences

Language: English

Topic: Advanced Materials and Semiconductor Technologies

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W4391968778

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