Cavities etched by pulsed and continuous flow of XeF2 for multispectral infrared sensors
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3002050
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4392638121
