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Cavities etched by pulsed and continuous flow of XeF2 for multispectral infrared sensors

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Year: 2024
Type: conference-paper
Source: Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications
DOI: 10.1117/12.3002050
Authors: Hadrian Aquino, Gergo Szakmany, David Burghoff, Chao Dong, Edward Kinzel, Alexei Orlov, Wolfgang Porod, David Strobel, Stephen White, Gary H. Bernstein
Institutions: University of Notre Dame, The University of Texas at Austin, Space Micro (United States)
Language: English

Topic: Plasmonic and Surface Plasmon Research
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences

Open Access status: closed
OpenAlex ID: W4392638121
FWCI: 2.968
Cites: 12
Cited by: 2
Related to: 10
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