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Rapid MOSFET threshold voltage testing for high throughput semiconductor process monitoring

Year: 2024

Type: conference-paper

Source: IEEE International Conference on Microelectronic Test Structures (ICMTS)

DOI: 10.1109/icmts59902.2024.10520252

Authors: Michael H. Herman, Trenton T. Nguyen, Ken Wong, Jeff Johnson, Ben Morris

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4396790425

FWCI: 0.766

Cites: 23

Cited by: 1

Related to: 10