High-efficiency thermo-optic control of a longitudinal radiation angle in a silicon-based optical phased array by leveraging the backside air trench structure
Year: 2024
Type: article
Source: Optics Letters
DOI: 10.1364/ol.524469
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G4237034042, G4341197141, G6805353296
OpenAlex ID: W4400487274
