Work

Source and characteristics of inorganic acidic gases and aerosols emission in a semiconductor plant

Year: 2024

Type: article

Source: Separation and Purification Technology

DOI: 10.1016/j.seppur.2024.128806

Authors: Jyun-Lun Peng, Ming-Peng Yeh, Kuan-Hung Liu, Tony Chen, Tzu-Sou Chuang, Sher Ling Lee, Kuo-Lun Tung

Institutions: Taiwan Semiconductor Manufacturing Company (Taiwan), National Taiwan University

Language: English

Topic: Industrial Gas Emission Control

Subfield: Environmental Engineering

Field: Environmental Science

Domain: Physical Sciences

SDG: Responsible consumption and production

Open Access status: closed

Funder: Taiwan Semiconductor Manufacturing Company

Award: G361091640

OpenAlex ID: W4400616765

FWCI: 0.527

Cites: 46

Cited by: 5

Related to: 10