Development of Electron-Beam Induced Soft X-ray and Vacuum Ultraviolet Emission Spectrometer
Year: 2024
Type: article
Source: Microscopy and Microanalysis
Institutions: JEOL (Japan), JEOL (United States)
Language: English
Subfield: Radiation
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4401006573
