Work

Study on the regulation factors and mechanism of self-heating effects in non-rectangular 14 nm bulk FinFET*

Year: 2024

Type: article

Source: Semiconductor Science and Technology

DOI: 10.1088/1361-6641/ad689f

Authors: Zhaohui Qin, Lan Chen, Renjie Lu, Yali Wang, Xiaoran Hao, Rong Chen, Yan Sun, Qin Du

Institutions: Chinese Academy of Sciences, Institute of Microelectronics

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401067006

FWCI: 0.308

Cites: 31

Cited by: 3

Related to: 10