Work

Design of plasma strip chamber for uniform gas supply with fluid flow simulation

Year: 2024

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0003782

Authors: Ji Won Jang, Se Yun Jo, Sang Jeen Hong

Institution: Myongji University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Research Council of Science and Technology, Korea Evaluation Institute of Industrial Technology

Awards: G7235635650, G75951965

OpenAlex ID: W4401086331

FWCI:

Cites: 31

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Related to: 10