Work

Atomic level surface on aspheric quartz crucible with large sizes induced by developed green chemical mechanical polishing with composite rare earth oxides

Year: 2024

Type: article

Source: Surfaces and Interfaces

DOI: 10.1016/j.surfin.2024.104924

Authors: Huiguang Sun, Zhenyu Zhang, Zinuo Zeng, Xiangxiang Cui, Cheng Fan, Yang Gu, Hongxiu Zhou, Chunjing Shi, Hao Xu

Institutions: Dalian University of Technology, Chengdu University of Technology, Soochow University, Hainan University, Hangzhou Dianzi University

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Provincial Foundation for Excellent Young Talents of Colleges and Universities of Anhui Province, National Key Research and Development Program of China Stem Cell and Translational Research, Program for Changjiang Scholars and Innovative Research Team in University, Key Research and Development Program of Zhejiang Province

Awards: G477379484, G5173101762

OpenAlex ID: W4401437175

FWCI: 2.334

Cites: 43

Cited by: 16

Related to: 10