Work

Studies of Structural and Mechanical Properties of AlGaN Thin Films on Nano-SiC/Si Hybrid Substrates

Year: 2024

Type: article

Source: Semiconductors

DOI: 10.1134/s1063782624020064

Authors: A. S. Grashchenko, S. A. Kukushkin, S. S. Sharofidinov

Institutions: Institute of Problems of Mechanical Engineering, Ioffe Institute

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402129284

FWCI: 1.165

Cites: 11

Cited by: 9

Related to: 10