Work

Stabilization of Tetragonal Phase in Hafnium Zirconium Oxide by Cation Doping for High-K Dielectric Insulators

Year: 2024

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.4c12407

Authors: Jae Young Kim, Sung Hyuk Park, Yeong Jae Kim, Jae Hyun Kim, Sung Kyun Choi, Hee Ryeong Kwon, Yoon Jung Lee, Seung Ju Kim, Dongmin Shin, Byungwook Yeo, Beom-Jong Kim, Hyung-Suk Jung, Ho Won Jang

Institutions: Seoul National University, Northwestern University, University of Southern California, Samsung Electronics (South Korea), Advanced Institute of Convergence Technology

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Research Foundation of Korea, Samsung

Awards: G2450436831, G3256897041

OpenAlex ID: W4403734281

FWCI: 1.333

Cites: 22

Cited by: 14

Related to: 10