Year: 2023
Type: conference-paper
Abstract: A new concept of agile and multimodal chemical sensing platform, named “Sensor Chiplet” is proposed andexperimentally validated. The concept is inspired by the recent trend in large scale integrated (LSI) circuits, toquickly realize high functionality by pieces of LSI “Chiplets”. As a proof of concept, pH and albumin sensingwas demonstrated by a bimodal device composed of two planar “Sensor Chiplets” having microelectrode arrays(MEAs). Two 8 ×16 mm2 Si chiplets with thirteen gold (Au) and indium tin oxide (ITO) microelectrodes withmaximum electrode size of 512 × 512 µm2 were fabricated, functionalized, integrated and tested using surfacemicromachining, deep-reactive ion etching (RIE) and subsequent chemical functionalization. Results obtainedshows that the proposed concept enables the integration of modalities without sacrificing sensitivity.
Source: HAL
Institutions: The University of Tokyo, Centre National de la Recherche Scientifique, Laboratory for Integrated Micro-Mechatronic Systems, Centre de Nanosciences et de Nanotechnologies, Laboratories for International Research on Multi-disciplinary Micro Systems, The University of Tokyo, Institute of Industrial Science, The University of Tokyo
Language: English
Subfield: Analytical Chemistry
Field: Chemistry
Domain: Physical Sciences
Open Access status: green
Funders: Department of Science and Technology, Ministry of Science and Technology, India, Ministry of Education, Culture, Sports, Science and Technology, University of Tokyo, Japan Society for the Promotion of Science, Core Research for Evolutional Science and Technology, Strategic International Collaborative Research Program
OpenAlex ID: W4404166016