Enhanced inverse problem solution in angle-resolved scatterometry using a combination of library search and particle swarm algorithm
Year: 2025
Type: article
Source: Optics & Laser Technology
Authors: Dekun Yang, Wei Liang, Shizhao Wang, Wei Shen, Jiantao Zhou, Guanjun Wang, Chong Shen
Institutions: Hainan University, Wuhan University
Language: English
Subfield: Instrumentation
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Funder: Hainan University
Award: G2399943046
OpenAlex ID: W4406203660