Influence of annealing treatment on stress and piezoelectric properties of high temperature alloy rigid substrate piezoelectric thin film sensors
Year: 2025
Type: article
Source: Journal of Alloys and Compounds
Authors: Hui Yu, Chenguang Guo, Guowei Mo
Institutions: Liaoning Technical University, Zhongshan Polytechnic
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G3101067360, G7451341660
OpenAlex ID: W4411545797