Work

Measurement and Simulation of Temperature Fields in Multistage Microwave Plasma for Nanomaterial Synthesis

Year: 2025

Type: conference-abstract

Source: IEEE International Conference on Plasma Science (ICOPS)

DOI: 10.1109/ppps56198.2025.11248785

Authors: W. Ma, X. Bai, N. Luo, Z. Jie, G. Zhang

Institution: Tsinghua University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4416799686

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