Characterization of yttria-stabilized zirconia thin films deposited by electron beam evaporation on silicon substrates
Year: 1998
Type: article
Source: Journal of Materials Science
Institutions: Slovak Academy of Sciences, Institute of Physics of the Slovak Academy of Sciences, Czech Academy of Sciences, FZU - Institute of Physics of the Czech Academy of Sciences, Comenius University Bratislava, Institute of Electrical Engineering of the Slovak Academy of Sciences, Centre National de la Recherche Scientifique
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W45768675