Work

Development of Piezoelectric and Electrostatic RF MEMS Devices

Year: 2014

Type: book-chapter

Source: Springer tracts in mechanical engineering

DOI: 10.1007/978-81-322-1913-2_10

Authors: Abhay Joshi, Abhijeet Kshirsagar, S. DattaGupta, K. Natarajan, S. A. Gangal

Institutions: Savitribai Phule Pune University, Indian Institute of Technology Bombay, Ramaiah Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W48128959

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Cites: 15

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Related to: 10