Work

Morphology of PVD films

Year: 1982

Type: article

Source: OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)

Authors: M.J. Carr, V. K. Grotzky, C.J. Helms, W.L. Johns, E. R. Naimon, A.L. Rafalski, Carl J. Smith

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W53998441

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