Work

Enhanced surface blistering of germanium with B+∕H+ coimplantation

Year: 2009

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.3123321

Authors: Xiaobo Ma, Xiaofeng Du, Weili Liu, Chao Chen, Zhitang Song, Chenglu Lin

Institutions: Shanghai Institute of Microsystem and Information Technology, University of Chinese Academy of Sciences, State Key Laboratory of Functional Materials for Informatics

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W58073541

FWCI: 0.506

Cites: 13

Cited by: 5

Related to: 10