Work

High-accuracy self-mixing interferometer based on single high-order orthogonally polarized feedback effects

Year: 2015

Type: article

Abstract: A simple and high-accuracy self-mixing interferometer based on single high-order orthogonally polarized feedback effects is presented. The single high-order feedback effect is realized when dual-frequency laser reflects numerous times in a Fabry-Perot cavity and then goes back to the laser resonator along the same route. In this case, two orthogonally polarized feedback fringes with nanoscale resolution are obtained. This self-mixing interferometer has the advantages of higher sensitivity to weak signal than that of conventional interferometer. In addition, two orthogonally polarized fringes are useful for discriminating the moving direction of measured object. The experiment of measuring 2.5nm step is conducted, which shows a great potential in nanometrology.

Source: Optics Express

DOI: 10.1364/oe.23.016977

Authors: Zhaoli Zeng, Xueming Qu, Yidong Tan, Runtao Tan, Shulian Zhang

Institutions: Air Force Medical University, Tsinghua University

Language: English

Topic: Semiconductor Lasers and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

Funders: National Natural Science Foundation of China, National Physical Laboratory