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高速超精密ステージ用非共振型超音波モータの開発 : 予圧機構とステージ駆動性能(第5報)

Year: 2002

Type: article

Source: 精密工学会大会学術講演会講演論文集

Authors: 泰史遠藤, 弘幸橋口, 義也江頭, 恵市永本, 哲也小坂, 哲也岩渕, 光二小坂, 明良中田, 弘久保田

Language: Japanese

Topic: Piezoelectric Actuators and Control

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W609203293

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