Year: 2014
Type: dissertation
Abstract: This thesis describes several approaches for material characterization using helium ion microscopy (HIM). Furthermore, it also demonstrates a possibility for in-situ observation and investigation of material modification and defect creation. This has been done using He+ ions with an energy of several tens of keV. The influence of a sub-nanometer He+ ion beam on different classes of materials, such as metals, semiconductors and insulators, was studied in the current work.
Author: Vasilisa Veligura
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: gold
OpenAlex ID: W62849260